Scope of the Conference

ULIS2003 will continue the series of high-level Workshops on ultimate integration of Silicon, started in Grenoble in the year 2000.
The aim of this 2 days-Workshop is to provide an open forum for the presentation and discussion of recent research and development results in technology, physics, modeling and characterization of advanced silicon devices. Main topics of interest are: decananometer Si MOSFETs, novel Si-based devices including vertical MOSFET, SOI , SiGe, Double Gate etc. Low power, high speed and high frequency applications. Interconnects. Silicon process and material technologies including CMOS logic and memory, thin and high-k dielectrics. Process and device characterization techniques. Decananometer MOS transistor physics and reliability. Modeling and simulation of ULSI devices.